Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9716015 | Carrier and a method for processing a carrier | — | 2017-07-25 |
| 9711393 | Silicon on nothing devices and methods of formation thereof | Thoralf Kautzsch, Alessia Scire | 2017-07-18 |
| 9663354 | Mechanical stress-decoupling in semiconductor device | Dirk Meinhold | 2017-05-30 |
| 9613878 | Carrier and a method for processing a carrier | — | 2017-04-04 |
| 9560765 | Electronic device, a method for manufacturing an electronic device, and a method for operating an electronic device | Thoralf Kautzsch, Alessia Scire, Franz Hirler, Anton Mauder, Wolfgang Scholz +2 more | 2017-01-31 |
| 9382111 | Micromechanical system and method for manufacturing a micromechanical system | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Maik Stegemann, Boris Binder | 2016-07-05 |
| 9330929 | Systems and methods for horizontal integration of acceleration sensor structures | Thoralf Kautzsch, Heiko Fröhlich, Mirko Vogt, Maik Stegemann, Andre Röth | 2016-05-03 |
| 9263357 | Carrier with hollow chamber and support structure therein | — | 2016-02-16 |
| 9236241 | Wafer, a method for processing a wafer, and a method for processing a carrier | Thoralf Kautzsch, Alessia Scire, Uwe Rudolph, Marco Mueller, Boris Binder | 2016-01-12 |
| 9136328 | Silicon on nothing devices and methods of formation thereof | Thoralf Kautzsch, Alessia Scire | 2015-09-15 |