Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9546923 | Sensor structures, systems and methods with improved integration and optimized footprint | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann, Andre Röth, Bernhard Winkler +1 more | 2017-01-17 |
| 9330929 | Systems and methods for horizontal integration of acceleration sensor structures | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann, Andre Röth, Steffen Bieselt | 2016-05-03 |
| 9136136 | Method and structure for creating cavities with extreme aspect ratios | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann | 2015-09-15 |