Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12043539 | Sensor system with a microelectromechanical sensor element and method for producing a sensor system | Dirk Meinhold, Steffen Bieselt, Claudia HENGST, Daniel Koehler, Erhard Landgraf | 2024-07-23 |
| 11493532 | Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element | Erhard Landgraf, Stephan Gerhard Albert, Steffen Bieselt, Matthias Rose | 2022-11-08 |
| 10852319 | Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element | Erhard Landgraf, Stephan Gerhard Albert, Steffen Bieselt, Matthias Rose | 2020-12-01 |
| 10843915 | Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device | Uwe Rudolph | 2020-11-24 |
| 10266389 | Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device | Uwe Rudolph | 2019-04-23 |