Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9641153 | Method of forming a resonator | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann, Thomas Santa, Markus Burian | 2017-05-02 |
| 9452923 | Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann | 2016-09-27 |
| 9382111 | Micromechanical system and method for manufacturing a micromechanical system | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann, Boris Binder, Steffen Bieselt | 2016-07-05 |
| 9376314 | Method for manufacturing a micromechanical system | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann, Boris Binder | 2016-06-28 |
| 9209778 | Microelectromechanical resonators | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann, Thomas Santa, Markus Burian | 2015-12-08 |