Issued Patents All Time
Showing 51–75 of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9560765 | Electronic device, a method for manufacturing an electronic device, and a method for operating an electronic device | Alessia Scire, Steffen Bieselt, Franz Hirler, Anton Mauder, Wolfgang Scholz +2 more | 2017-01-31 |
| 9551837 | Silicon optical line multiplexer devices | — | 2017-01-24 |
| 9550669 | Vertical pressure sensitive structure | — | 2017-01-24 |
| 9546923 | Sensor structures, systems and methods with improved integration and optimized footprint | Heiko Fröhlich, Mirko Vogt, Maik Stegemann, Andre Röth, Bernhard Winkler +1 more | 2017-01-17 |
| 9536918 | Integrated circuit with cavity-based electrical insulation of a photodiode | — | 2017-01-03 |
| 9527725 | Semiconductor structure with lamella defined by singulation trench | Boris Binder, Bernd Foeste, Stefan Kolb, Marco Mueller | 2016-12-27 |
| 9452923 | Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region | Heiko Froehlich, Mirko Vogt, Maik Stegemann | 2016-09-27 |
| 9431554 | Semiconductor light trap device | — | 2016-08-30 |
| 9382111 | Micromechanical system and method for manufacturing a micromechanical system | Heiko Froehlich, Mirko Vogt, Maik Stegemann, Boris Binder, Steffen Bieselt | 2016-07-05 |
| 9376314 | Method for manufacturing a micromechanical system | Heiko Froehlich, Mirko Vogt, Maik Stegemann, Boris Binder | 2016-06-28 |
| 9368654 | Photodetector and method for manufacturing the same | — | 2016-06-14 |
| 9330929 | Systems and methods for horizontal integration of acceleration sensor structures | Heiko Fröhlich, Mirko Vogt, Maik Stegemann, Andre Röth, Steffen Bieselt | 2016-05-03 |
| 9318633 | Photodetector with controllable spectral response | — | 2016-04-19 |
| 9293529 | Semiconductor device with an array of lamellas and a micro-electro-mechanical resonator | — | 2016-03-22 |
| 9236241 | Wafer, a method for processing a wafer, and a method for processing a carrier | Alessia Scire, Steffen Bieselt, Uwe Rudolph, Marco Mueller, Boris Binder | 2016-01-12 |
| 9209778 | Microelectromechanical resonators | Heiko Froehlich, Mirko Vogt, Maik Stegemann, Thomas Santa, Markus Burian | 2015-12-08 |
| 9202832 | Integrated circuit arrangements | Dieter Kaiser, Dirk Meinhold, Georg Holfeld | 2015-12-01 |
| 9190540 | Photo cell devices for phase-sensitive detection of light signals | — | 2015-11-17 |
| 9136328 | Silicon on nothing devices and methods of formation thereof | Alessia Scire, Steffen Bieselt | 2015-09-15 |
| 9136136 | Method and structure for creating cavities with extreme aspect ratios | Heiko Fröhlich, Mirko Vogt, Maik Stegemann | 2015-09-15 |
| 9117874 | Method for fabricating a trench structure, and a semiconductor arrangement comprising a trench structure | Franz Hirler, Anton Mauder, Michael Rueb, Hans-Joachim Schulze, Helmut Strack +1 more | 2015-08-25 |
| 8994127 | Method of fabricating isolating semiconductor structures using a layout of trenches and openings | Boris Binder, Torsten Helm, Stefan Kolb, Marc Probst, Uwe Rudolph | 2015-03-31 |
| 8975715 | Photodetector and method for manufacturing the same | — | 2015-03-10 |
| 8957490 | Silicon light trap devices | — | 2015-02-17 |
| 8921954 | Method of providing a semiconductor structure with forming a sacrificial structure | Stefan Kolb, Boris Binder, Bernd Foeste, Marco Mueller | 2014-12-30 |