Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003538 | Method for producing a structure on the surface of a substrate | Dietmar Temmler, Peter Moll | 2011-08-23 |
| 7867912 | Methods of manufacturing semiconductor structures | Dirk Caspary, Arnd Scholz, Stefano Parascandola | 2011-01-11 |
| 7491474 | Masks for lithographic imagings and methods for fabricating the same | — | 2009-02-17 |
| 7443484 | Method for exposing a semiconductor wafer by applying periodic movement to a component | Joerg Tschischgale | 2008-10-28 |
| 7368385 | Method for producing a structure on the surface of a substrate | Dietmar Temmler, Peter Moll | 2008-05-06 |
| 7361434 | Phase shift mask | — | 2008-04-22 |
| 7297468 | Method for forming a structure element on a wafer by means of a mask and a trimming mask assigned hereto | — | 2007-11-20 |
| 7286207 | Exposing a semiconductor wafer using two different spectral wavelengths and adjusting for chromatic aberration | Andreas Jahnke | 2007-10-23 |
| 7207030 | Method for improving a simulation model of photolithographic projection | Bernd Küchler, Ralf Ziebold | 2007-04-17 |
| 7070887 | Photolithographic mask | — | 2006-07-04 |
| 7011936 | Photomask and method of structuring a photoresist by double exposure with imaging auxiliary structures and different exposure tools | Armin Semmler, Gunther Czech | 2006-03-14 |
| 6730463 | Method for determining and removing phase conflicts on alternating phase masks | Michael Heissmeier, Markus Hofsäss, Burkhard Ludwig, Molela Moukara | 2004-05-04 |
| 6680151 | Alternating phase mask | Michael Heissmeier, Markus Hofsäss, Burkhard Ludwig, Molela Moukara | 2004-01-20 |
| 6569772 | Method for producing an alternating phase mask | Josef Mathuni, Jurgen Knobloch | 2003-05-27 |
| 6162554 | Method and system for utilizing enthalpy contained in exhaust gases of low-temperature fuel cells | Roland Kircher | 2000-12-19 |
| 6162556 | Method for operating a high-temperature fuel cell installation, and a high-temperature fuel cell installation | Horst Vollmar, Heiner Edelmann, Wolfgang Schrepfer | 2000-12-19 |
| 6080502 | Fluid-cooled fuel cell with distribution ducts | Arno Mattejat | 2000-06-27 |
| 6010798 | PEM fuel cell | Albert Hammerschmidt, Wolf-Dieter Domke, Peter Suchy | 2000-01-04 |
| 5976722 | Process for operating a fuel cell installation and fuel cell installation for carrying out the process | Reinhard Muller, Walter Stuhler | 1999-11-02 |