Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8138538 | Interconnect structure for semiconductor devices | Hans-Peter Moll, Gouri Sankar Kar, Martin Popp, Lars Heineck, Peter Lahnor +8 more | 2012-03-20 |
| 7867912 | Methods of manufacturing semiconductor structures | Dirk Caspary, Stefano Parascandola, Christoph Nolscher | 2011-01-11 |
| 7863136 | Method of manufacturing integrated circuits including a FET with a gate spacer and a fin | Matthias Goldbach, Jessica Hartwich, Lars Dreeskornfeld, Tobias Mono | 2011-01-04 |
| 7622354 | Integrated circuit and method of manufacturing an integrated circuit | Lars Dreeskornfeld, Jessica Hartwich, Tobias Mono, Stefan Slesazeck | 2009-11-24 |
| 6951822 | Method for forming inside nitride spacer for deep trench device DRAM cell | — | 2005-10-04 |
| 6825093 | Process window enhancement for deep trench spacer conservation | — | 2004-11-30 |
| 6673686 | Method of forming a gate electrode contact spacer for a vertical DRAM device | Klaus Hummler | 2004-01-06 |
| 6620699 | Method for forming inside nitride spacer for deep trench device DRAM cell | Prakash Dev | 2003-09-16 |
| 6586300 | Spacer assisted trench top isolation for vertical DRAM's | Klaus Hummler | 2003-07-01 |