Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7443484 | Method for exposing a semiconductor wafer by applying periodic movement to a component | Christoph Nolscher | 2008-10-28 |
| 7423765 | Optical system of a microlithographic projection exposure apparatus | Toralf Gruner | 2008-09-09 |