Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7484189 | Method for searching for potential faults in a layout of an integrated circuit | Eva-Maria Nash | 2009-01-27 |
| 7393614 | Set of masks including a first mask and a second trimming mask with a semitransparent region having a transparency between 20% and 80% to control diffraction effects and obtain maximum depth of focus for the projection of structure patterns onto a semiconductor wafer | Roderick Köhle, Rainer Pforr, Jorg Thiele, Wolfgang Dettmann, Mario Hennig | 2008-07-01 |
| 6730463 | Method for determining and removing phase conflicts on alternating phase masks | Michael Heissmeier, Burkhard Ludwig, Molela Moukara, Christoph Nolscher | 2004-05-04 |
| 6680151 | Alternating phase mask | Michael Heissmeier, Burkhard Ludwig, Molela Moukara, Christoph Nolscher | 2004-01-20 |