Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10856767 | 300 MHz to 3 THz electromagnetic wave sensor for determining an interstitial fluid parameter in vivo | Herbert Roedig, Georg Schmidt | 2020-12-08 |
| 9838086 | Communication arrangement | Nicolas Falleau, Florian Grimminger, Thomas Herndl, Gerald Holweg, Rainer Matischek +1 more | 2017-12-05 |
| 7393613 | Set of at least two masks for the projection of structure patterns | Jorg Thiele, Rainer Pforr, Mario Hennig, Karsten Zeiler | 2008-07-01 |
| 7393614 | Set of masks including a first mask and a second trimming mask with a semitransparent region having a transparency between 20% and 80% to control diffraction effects and obtain maximum depth of focus for the projection of structure patterns onto a semiconductor wafer | Roderick Köhle, Rainer Pforr, Jorg Thiele, Markus Hofsäss, Mario Hennig | 2008-07-01 |
| 7262850 | Method for inspection of periodic grating structures on lithography masks | Roderick Koehle, Martin Verbeek | 2007-08-28 |
| 7045254 | Mask with programmed defects and method for the fabrication thereof | Gunter Antesberger, Jan Heumann, Mario Hennig | 2006-05-16 |