Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7393613 | Set of at least two masks for the projection of structure patterns | Wolfgang Dettmann, Rainer Pforr, Mario Hennig, Karsten Zeiler | 2008-07-01 |
| 7393614 | Set of masks including a first mask and a second trimming mask with a semitransparent region having a transparency between 20% and 80% to control diffraction effects and obtain maximum depth of focus for the projection of structure patterns onto a semiconductor wafer | Roderick Köhle, Rainer Pforr, Wolfgang Dettmann, Markus Hofsäss, Mario Hennig | 2008-07-01 |
| 7354683 | Lithography mask for imaging of convex structures | Molela Moukara, Burkhard Ludwig, Marco Ahrens, Roderick Köhle, Rainer Pforr +1 more | 2008-04-08 |
| 6745380 | Method for optimizing and method for producing a layout for a mask, preferably for use in semiconductor production, and computer program therefor | Christof Bodendorf | 2004-06-01 |
| 6692875 | Mask for optical projection systems, and a process for its production | Werner Fischer, Fritz Gans, Rainer Pforr | 2004-02-17 |
| 6562664 | Method for installing protective components in integrated circuits that are constructed from standard cells | Markus Hübl | 2003-05-13 |
| 6493865 | Method of producing masks for fabricating semiconductor structures | Werner Fischer, Burkhard Ludwig, Dirk Meyer | 2002-12-10 |