Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7354683 | Lithography mask for imaging of convex structures | Molela Moukara, Burkhard Ludwig, Jorg Thiele, Roderick Köhle, Rainer Pforr +1 more | 2008-04-08 |
| 6664010 | OPC method for generating corrected patterns for a phase-shifting mask and its trimming mask and associated device and integrated circuit configuration | Wilhelm Maurer, Juergen Knobloch, Rainer Zimmermann | 2003-12-16 |