Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8293431 | Lithographic mask and method of forming a lithographic mask | Haiko Rolff, Carla Byloos, Christoph Noelscher, Nicolo Morgana, Roderick Koehle +3 more | 2012-10-23 |
| 7354683 | Lithography mask for imaging of convex structures | Burkhard Ludwig, Jorg Thiele, Marco Ahrens, Roderick Köhle, Rainer Pforr +1 more | 2008-04-08 |
| 7339652 | Apparatus for projecting a pattern into an image plane | Rainer Pforr, Thomas Muelders, Mario Hennig, Karsten Zeiler | 2008-03-04 |
| 7183022 | Method for producing a mask set for lithography including at least one mask and methods for imaging structures of a predetermined layout into a common exposure plane | Reinhard Pufall | 2007-02-27 |
| 7143390 | Method for creating alternating phase masks | — | 2006-11-28 |
| 6981241 | Method for eliminating phase conflict centers in alternating phase masks, and method for producing alternating phase masks | Burkhard Ludwig | 2005-12-27 |
| 6957414 | Method for determining the ability to project images of integrated semiconductor circuits onto alternating phase masks | Burkhard Ludwig | 2005-10-18 |
| 6730463 | Method for determining and removing phase conflicts on alternating phase masks | Michael Heissmeier, Markus Hofsäss, Burkhard Ludwig, Christoph Nolscher | 2004-05-04 |
| 6680151 | Alternating phase mask | Michael Heissmeier, Markus Hofsäss, Burkhard Ludwig, Christoph Nolscher | 2004-01-20 |
| 6660437 | Alternating phase mask | Christoph Friedrich, Uwe Griesinger, Michael Heissmeier, Burkhard Ludwig, Rainer Pforr | 2003-12-09 |
| 6543045 | Method for detecting and automatically eliminating phase conflicts on alternating phase masks | Burkhard Ludwig | 2003-04-01 |