Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11640908 | Method of implanting an implant species into a substrate at different depths | Joerg Ortner, Marcel Heller, Dieter Kaiser, Jens Schneider | 2023-05-02 |
| 8293431 | Lithographic mask and method of forming a lithographic mask | Haiko Rolff, Carla Byloos, Christoph Noelscher, Roderick Koehle, Molela Moukara +3 more | 2012-10-23 |
| 7354683 | Lithography mask for imaging of convex structures | Molela Moukara, Burkhard Ludwig, Jorg Thiele, Marco Ahrens, Roderick Köhle +1 more | 2008-04-08 |