Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8293431 | Lithographic mask and method of forming a lithographic mask | Haiko Rolff, Carla Byloos, Nicolo Morgana, Roderick Koehle, Molela Moukara +3 more | 2012-10-23 |
| 8043794 | Method of double patterning, method of processing a plurality of semiconductor wafers and semiconductor device | Yi-Ming Chiu, Yuan-Hsun Wu | 2011-10-25 |
| 7872729 | Filter system for light source | Sven Trogisch | 2011-01-18 |
| 7825031 | Method of fabricating a semiconductor device | Dirk Manger, Rolf Weis | 2010-11-02 |
| 7794614 | Methods for generating sublithographic structures | Rolf Weis | 2010-09-14 |
| 7767571 | Method for manufacturing a structure in a semiconductor device and a structure in a semiconductor device | Sebastian Mosler | 2010-08-03 |
| 7759242 | Method of fabricating an integrated circuit | Steffen Meyer, Rolf Weis, Burkhard Ludwig | 2010-07-20 |
| 7737049 | Method for forming a structure on a substrate and device | Dirk Manger, Stephan Wege, Rolf Weis | 2010-06-15 |
| 7535044 | Semiconductor device, method for manufacturing a semiconductor device and mask for manufacturing a semiconductor device | Dietmar Temmler | 2009-05-19 |
| 7370313 | Method for optimizing a photolithographic mask | Bernd Kuechler, Roderick Koehle | 2008-05-06 |
| 7011909 | Photolithography mask and method of fabricating a photolithography mask | — | 2006-03-14 |
| 5397664 | Phase mask for projection lithography and method for the manufacture thereof | Leonhard Mader | 1995-03-14 |
| 5284724 | Phase mask for projection lithography and method for the manufacture thereof comprising a selectively etchable phase shift layer directly on substrate | Leonhard Mader | 1994-02-08 |