Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7855776 | Methods of compensating lens heating, lithographic projection system and photo mask | Rainer Pforr, Thomas Muelders | 2010-12-21 |
| 7370313 | Method for optimizing a photolithographic mask | Christoph Noelscher, Roderick Koehle | 2008-05-06 |