Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7855776 | Methods of compensating lens heating, lithographic projection system and photo mask | Bernd Kuechler, Rainer Pforr | 2010-12-21 |
| 7456933 | Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatus | Ulrich Wegmann, Vladimir Kamenov, Toralf Gruner, Markus Mengel | 2008-11-25 |
| 7339652 | Apparatus for projecting a pattern into an image plane | Molela Moukara, Rainer Pforr, Mario Hennig, Karsten Zeiler | 2008-03-04 |