Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10697852 | Measuring method and measuring system for interferometrically measuring the imaging quality | — | 2020-06-30 |
| 10502545 | Measuring method and measuring arrangement for an imaging optical system | Hans-Michael Stiepan, Jochen Hetzler | 2019-12-10 |
| 10386728 | Device and method for wavefront analysis | — | 2019-08-20 |
| 10345710 | Microlithographic projection exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster, Ulrich Loering +6 more | 2019-07-09 |
| 9996014 | Optical imaging device with image defect determination | Rolf Freimann | 2018-06-12 |
| 9436095 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster, Ulrich Loering +6 more | 2016-09-06 |
| 9429495 | System for measuring the image quality of an optical imaging system | Markus Mengel, Albrecht Ehrmann, Wolfgang Emer, Reiner Clement, Ludo Mathijssen | 2016-08-30 |
| 9235131 | Optical imaging device with image defect determination | Rolf Freimann | 2016-01-12 |
| 8836929 | Device and method for the optical measurement of an optical system by using an immersion fluid | Uwe Shellhorn, Joachim Stuehler, Albrecht Ehrmann, Martin Schriever, Markus Goeppert +1 more | 2014-09-16 |
| 8823948 | System for measuring the image quality of an optical imaging system | Markus Mengel, Albrecht Ehrmann, Wolfgang Emer, Reiner Clement, Ludo Mathijssen | 2014-09-02 |
| 8786849 | Method for measuring an optical system | Thomas Korb, Christian Hettich, Michael Layh, Karl-Heinz Schuster, Matthias Manger | 2014-07-22 |
| 8654346 | Optical scattering disk, use thereof, and wavefront measuring apparatus | — | 2014-02-18 |
| 8537333 | Optical imaging device with image defect determination | Rolf Freimann | 2013-09-17 |
| 8488127 | System for measuring the image quality of an optical imaging system | Markus Mengel, Albrecht Ehrmann, Wolfgang Emer, Reiner Clement, Ludo Mathijssen | 2013-07-16 |
| 8330935 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster, Ulrich Loering +6 more | 2012-12-11 |
| 8199333 | Optical scattering disk, use thereof, and wavefront measuring apparatus | — | 2012-06-12 |
| 8169595 | Optical apparatus and method for modifying the imaging behavior of such apparatus | Martin Schriever, Stefan Hembacher, Bernhard Geuppert, Juergen Huber, Norbert Kerwien +2 more | 2012-05-01 |
| 8134716 | Methods and apparatus for measuring wavefronts and for determining scattered light, and related devices and manufacturing methods | Wolfgang Emer, Helmut Haidner | 2012-03-13 |
| 8120763 | Device and method for the optical measurement of an optical system by using an immersion fluid | Uwe Schellhorn, Joachim Stuehler, Albrecht Ehrmann, Martin Schriever, Markus Goeppert +1 more | 2012-02-21 |
| 8004690 | Device and method for the optical measurement of an optical system, measurement structure support, and microlithographic projection exposure apparatus | — | 2011-08-23 |
| 7911624 | Device and method for the interferometric measurement of phase masks | Helmut Haidner | 2011-03-22 |
| 7796274 | System for measuring the image quality of an optical imaging system | Markus Mengel, Albrecht Ehrmann, Wolfgang Emer, Reiner Clement, Ludo Mathussen | 2010-09-14 |
| 7760366 | System for measuring the image quality of an optical imaging system | Markus Mengel, Albrecht Ehrmann, Wolfgang Emer, Reiner Clement, Ludo Mathijssen | 2010-07-20 |
| 7623218 | Method of manufacturing a miniaturized device | Helmut Haidner | 2009-11-24 |
| 7570345 | Method of optimizing imaging performance | Gerd Reisinger, Manfred Maul, Paul Graeupner, Martin Schriever | 2009-08-04 |