Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9116441 | Illumination system of a microlithographic projection exposure apparatus | Nils Dieckmann, Manfred Maul, Oliver Natt | 2015-08-25 |
| 8786849 | Method for measuring an optical system | Thomas Korb, Michael Layh, Ulrich Wegmann, Karl-Heinz Schuster, Matthias Manger | 2014-07-22 |
| 8169594 | Illumination system of a microlithographic projection exposure apparatus | Nils Dieckmann, Manfred Maul, Oliver Natt | 2012-05-01 |