Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372877 | Projection exposure apparatus for semiconductor lithography | Markus Raab, Andreas Raba, Mirko Buechsenschuetz | 2025-07-29 |
| 12276916 | Drive device, optical system and lithography apparatus | Michel Aliman, Lars Berger, Mohammad Awad | 2025-04-15 |
| 12130557 | Optical system and lithography apparatus | Markus Raab | 2024-10-29 |
| 11920977 | Metrology system and method for measuring an excitation laser beam in an EUV plasma source | Florian Baumer | 2024-03-05 |
| 11737199 | Device and method for measuring the beam angle of a light beam guided by a beam guiding optical unit | Florian Baumer | 2023-08-22 |
| 11415892 | Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus | Matthias KAES, Steffen Bezold, Christoph Petri, Pavel Alexeev, Walter Pauls | 2022-08-16 |
| 11274914 | Measuring assembly for the frequency-based determination of the position of a component | Andreas Koeniger, Alexander Vogler | 2022-03-15 |
| 11099400 | Beam propagation camera and method for light beam analysis | — | 2021-08-24 |
| 11054305 | Method and device for beam analysis | Christoph Husemann, Matus Kalisky, Lars Stoppe | 2021-07-06 |
| 11048172 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Daniel Runde, Ulrich Mueller, Joerg Lichtenthaeler, André Orthen +3 more | 2021-06-29 |
| D914612 | Electrical junction box for motor diagnosis | Jan Andersson, Stephan Hühne, Michael Weigand | 2021-03-30 |
| 10605654 | Method and device for beam analysis | Christoph Husemann, Matus Kalisky, Lars Stoppe | 2020-03-31 |
| 10514608 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Daniel Runde, Ulrich Mueller, Joerg Lichtenthaeler, André Orthen +3 more | 2019-12-24 |
| D863226 | Electrical junction box for motor diagnosis | Jan Andersson, Stephan Hühne | 2019-10-15 |
| 9823119 | System and method for analyzing a light beam guided by a beam guiding optical unit | Florian Baumer | 2017-11-21 |
| 9720328 | Projection exposure system for microlithography and method of monitoring a lateral imaging stability | Armin Rauthe-Schoech, Ulrich Mueller | 2017-08-01 |
| 9235142 | Projection exposure system for microlithography and method of monitoring a lateral imaging stability | Armin Rauthe-Schoech, Ulrich Mueller | 2016-01-12 |
| 8786849 | Method for measuring an optical system | Thomas Korb, Christian Hettich, Michael Layh, Ulrich Wegmann, Karl-Heinz Schuster | 2014-07-22 |
| 8593642 | Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device | Rolf Freimann, Bernd Doerband, Stefan Schulte, Albrecht Hof, Frank Riepenhausen +3 more | 2013-11-26 |
| 8473237 | Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stage | Alexander Huebel, Gerd Klose, Uwe Schellhorn, Michael Arnz | 2013-06-25 |
| 8456616 | Optical system for microlithography | Daniel Kraehmer, Wilhelm Ulrich, Bernhard Gellrich | 2013-06-04 |
| 8416412 | Method for determination of residual errors | Uwe Schellhorn | 2013-04-09 |
| 7760345 | Method and apparatus for determining at least one optical property of an imaging optical system | Markus Goeppert, Gordon Doering, Alfred Gatzweiler | 2010-07-20 |
| 7755748 | Device and method for range-resolved determination of scattered light, and an illumination mask | Michael Arnz, Oswald Gromer, Gerd Klose, Joachim Stuehler | 2010-07-13 |
| 7408631 | Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask | Michael Arnz, Oswald Gromer, Gerd Klose, Joachim Stuehler | 2008-08-05 |