Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9964862 | Apparatus and method for bearing a lithography mask | — | 2018-05-08 |
| 8654345 | Optical system, in particular in a microlithographic projection exposure apparatus | Dietmar Neugebauer, Rolf Freimann | 2014-02-18 |
| 8593642 | Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device | Rolf Freimann, Bernd Doerband, Stefan Schulte, Frank Riepenhausen, Matthias Manger +3 more | 2013-11-26 |
| 8253947 | Device and method for measuring lithography masks | Günter Maul, Dietmar Neugebauer, Armin Bich, Monika Frey, Wolfgang Scherm +3 more | 2012-08-28 |
| 7130017 | Device for sealing a projection exposure apparatus | Guenter Maul, Lothar Gail, Wilfried Schierholz, Eberhard Jost | 2006-10-31 |
| 6864988 | Optical system with isolated measuring structure | Guenter Maul, Michael Muehlbeyer, Klaus Mehlkopp | 2005-03-08 |
| 6750949 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Dominicus Jacobus Petrus Adrianus Franken, Josephus Jacobus Smits, Antonius Johannes Josephus Van Dijsseldonk, Johannes Hubertus Josephina Moors +3 more | 2004-06-15 |
| 6523443 | Process for manufacturing optical surfaces and shaping machine for carrying out this process | Klaus Mehlkopp | 2003-02-25 |
| 6276066 | Positioning device | Lothar Scheibl | 2001-08-21 |
| 6089713 | Spectacle lens with spherical front side and multifocal back side and process for its production | Adalbert Hanssen | 2000-07-18 |
| 5379107 | Process and apparatus for the measurement of object topographies by means of projected fringe patterns | Adalbert Hanssen | 1995-01-03 |
| 5343294 | Method for analyzing periodic brightness patterns | Michael Kuchel | 1994-08-30 |
| 5307151 | Method and apparatus for three-dimensional optical measurement of object surfaces | Adalbert Hanssen | 1994-04-26 |
| 5135309 | Method and apparatus for non-contact measuring of object surfaces | Michael Kuchel | 1992-08-04 |
| 4963728 | Coordinate measuring apparatus having an optical sensing head | Wilhelm Ulrich, Lothar Rubl, Klaus-Peter Koch | 1990-10-16 |