Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7130017 | Device for sealing a projection exposure apparatus | Albrecht Hof, Guenter Maul, Wilfried Schierholz, Eberhard Jost | 2006-10-31 |
| 6626971 | Method and device for protecting persons and/or products from air-borne particles | Rainald Forbert, Ekkehard Eigenherr | 2003-09-30 |
| 6619901 | Method and apparatus for air guidance in a processing chamber | Berthold Duethorn, Thomas Hertfelder, Eberhard Jost | 2003-09-16 |
| 4396113 | Sliding sleeve for storage of samples | Klemens Thoma | 1983-08-02 |