Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7130017 | Device for sealing a projection exposure apparatus | Albrecht Hof, Guenter Maul, Lothar Gail, Wilfried Schierholz | 2006-10-31 |
| 6619901 | Method and apparatus for air guidance in a processing chamber | Berthold Duethorn, Thomas Hertfelder, Lothar Gail | 2003-09-16 |