Issued Patents All Time
Showing 1–25 of 133 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481500 | Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type | Hans-Juergen Mann, Erik Loopstra, David Shafer | 2019-11-19 |
| 10073256 | Device for imaging sample | Wolfgang Singer, Ralf Wolleschensky, David Shafer, Artur Degen | 2018-09-11 |
| 9964859 | Lithography projection objective, and a method for correcting image defects of the same | Ulrich Loering, Vladan Blahnik, Daniel Kraehmer, Norbert Wabra | 2018-05-08 |
| 9772478 | Catadioptric projection objective with parallel, offset optical axes | David Shafer, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple | 2017-09-26 |
| 9726979 | Catadioptric projection objective with intermediate images | Aurelian Dodoc, Alexander Epple | 2017-08-08 |
| 9482961 | Microlithography projection optical system, tool and method of production | Hans-Juergen Mann | 2016-11-01 |
| 9465300 | Catoptric objectives and systems using catoptric objectives | Hans-Juergen Mann, Marco Pretorius | 2016-10-11 |
| 9316922 | Lithography projection objective, and a method for correcting image defects of the same | Ulrich Loering, Vladan Blahnik, Daniel Kraehmer, Norbert Wabra | 2016-04-19 |
| 9304407 | Catoptric objectives and systems using catoptric objectives | Hans-Juergen Mann, David Shafer | 2016-04-05 |
| 9182578 | Imaging optical system and illumination optical system | Hans-Juergen Mann, Johannes Zellner, Aurelian Dodoc, Marco Pretorius, Christoph Menke +1 more | 2015-11-10 |
| 9146475 | Projection exposure system and projection exposure method | Paul Graupner, Olaf Conradi, Christoph Zaczek, Helmut Beierl, Toralf Gruner +1 more | 2015-09-29 |
| 9134618 | Catadioptric projection objective with intermediate images | Aurelian Dodoc, Alexander Epple | 2015-09-15 |
| 9057964 | Imaging optics and projection exposure installation for microlithography with an imaging optics | Hans-Juergen Mann, Johannes Zellner, Aurelian Dodoc, Claus Zahlten, Christoph Menke +2 more | 2015-06-16 |
| 9019596 | Catadioptric projection objective with intermediate images | Aurelian Dodoc, Alexander Epple | 2015-04-28 |
| 8970819 | Microlithography projection optical system, tool and method of production | Hans-Juergen Mann | 2015-03-03 |
| 8913316 | Catadioptric projection objective with intermediate images | Aurelian Dodoc, Alexander Epple | 2014-12-16 |
| 8908269 | Immersion catadioptric projection objective having two intermediate images | David Shafer, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple +2 more | 2014-12-09 |
| 8879159 | Lithography projection objective, and a method for correcting image defects of the same | Ulrich Loering, Vladan Blahnik, Daniel Kraehmer, Norbert Wabra | 2014-11-04 |
| 8873151 | Illumination system for a microlithgraphic exposure apparatus | Alexander Sohmer, Aurelian Dodoc, Heiko Feldmann, Gerhard Fuerter, Rafael Egger +2 more | 2014-10-28 |
| 8804234 | Catadioptric projection objective including an aspherized plate | David Shafer, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple | 2014-08-12 |
| 8730572 | Catadioptric projection objective | David Shafer, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple +2 more | 2014-05-20 |
| 8659744 | Method for correcting a lithography projection objective, and such a projection objective | Thomas Okon, Norbert Wabra, Toralf Gruner, Boris Bittner, Volker Graeschus | 2014-02-25 |
| 8632195 | Catoptric objectives and systems using catoptric objectives | Hans-Juergen Mann, David Shafer | 2014-01-21 |
| 8605255 | Imaging optical system and projection exposure system including the same | Hans-Juergen Mann, Stephan Muellender, Hartmut Enkisch | 2013-12-10 |
| 8456616 | Optical system for microlithography | Daniel Kraehmer, Matthias Manger, Bernhard Gellrich | 2013-06-04 |