Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9665006 | Projection exposure method and projection exposure apparatus for microlithography | Toralf Gruner | 2017-05-30 |
| 9146475 | Projection exposure system and projection exposure method | Paul Graupner, Olaf Conradi, Christoph Zaczek, Wilhelm Ulrich, Helmut Beierl +1 more | 2015-09-29 |
| 8659744 | Method for correcting a lithography projection objective, and such a projection objective | Wilhelm Ulrich, Thomas Okon, Norbert Wabra, Toralf Gruner, Boris Bittner | 2014-02-25 |
| 8174676 | Method for correcting a lithography projection objective, and such a projection objective | Wilhelm Ulrich, Thomas Okon, Norbert Wabra, Toralf Gruner, Boris Bittner | 2012-05-08 |