Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9285685 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Johannes Catharinus Hubertus Mulkens +1 more | 2016-03-15 |
| 9146475 | Projection exposure system and projection exposure method | Olaf Conradi, Christoph Zaczek, Wilhelm Ulrich, Helmut Beierl, Toralf Gruner +1 more | 2015-09-29 |
| 8570486 | Lithographic apparatus and device manufacturing method | Johannes Catharinus Hubertus Mulkens, Johannes Jacobus Matheus Baselmans, Erik Roelof Loopstra, Bob Streefkerk | 2013-10-29 |
| 8472006 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Jan Haisma, Nicodemus Hattu, Christiaan Alexander Hoogendam +3 more | 2013-06-25 |
| 8174674 | Lithographic apparatus and device manufacturing method | Johannes Catharinus Hubertus Mulkens, Johannes Jacobus Matheus Baselmans, Erik Roelof Loopstra, Bob Streefkerk | 2012-05-08 |
| 7715107 | Optical element for correction of aberration, and a lithographic apparatus comprising same | Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens | 2010-05-11 |
| 7545481 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Jan Haisma, Nicodemus Hattu, Christiaan Alexander Hoogendam +3 more | 2009-06-09 |
| 7433015 | Lithographic apparatus and device manufacturing method | Johannes Catharinus Hubertus Mulkens, Johannes Jacobus Matheus Baselmans, Erik Roelof Loopstra, Bob Streefkerk | 2008-10-07 |
| 7301622 | Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements | Bernd Geh, Thomas Stammler, Dirk Stenkamp, Jochen Stuhler, Klaus Wurmbrand | 2007-11-27 |
| 6934011 | Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements | Bernd Geh, Thomas Stammler, Dirk Stenkamp, Jochen Stuhler, Klaus Wurmbrand | 2005-08-23 |
| 6678240 | Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements | Bernd Geh, Klaus Wurmbrand, Thomas Stammler, Dirk Stenkamp, Jochen Stuhler | 2004-01-13 |