Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151929 | Illumination optical unit for projection lithography and hollow waveguide component therefor | Markus Deguenther | 2018-12-11 |
| 10088754 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2018-10-02 |
| 9606441 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2017-03-28 |
| 9280060 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2016-03-08 |
| 8873023 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2014-10-28 |
| 7605914 | Optical system and method for improving imaging properties thereof | Christian Wagner, Gerd Reisinger | 2009-10-20 |
| 7301622 | Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements | Bernd Geh, Paul Graupner, Dirk Stenkamp, Jochen Stuhler, Klaus Wurmbrand | 2007-11-27 |
| 6934011 | Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements | Bernd Geh, Paul Graupner, Dirk Stenkamp, Jochen Stuhler, Klaus Wurmbrand | 2005-08-23 |
| 6678240 | Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements | Bernd Geh, Paul Graupner, Klaus Wurmbrand, Dirk Stenkamp, Jochen Stuhler | 2004-01-13 |