Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8228483 | Projection objective for microlithography, projection exposure apparatus, projection exposure method and optical correction plate | Ulrich Loering, Franz-Josef Stickel, Sonja Schneider, Johann Trenkler, Stefan Kraus +2 more | 2012-07-24 |
| 7995280 | Projection exposure system, beam delivery system and method of generating a beam of light | Matthias Kuss, Damian Fiolka, Manfred Maul, Vladimir Davydenko | 2011-08-09 |
| 7605914 | Optical system and method for improving imaging properties thereof | Thomas Stammler, Christian Wagner | 2009-10-20 |
| 7570345 | Method of optimizing imaging performance | Manfred Maul, Paul Graeupner, Martin Schriever, Ulrich Wegmann | 2009-08-04 |
| 7233386 | Method of optimizing imaging performance | Manfred Maul, Paul Graeupner, Martin Schriever, Ulrich Wegmann | 2007-06-19 |
| 6936825 | Process for the decontamination of microlithographic projection exposure devices | Michael Gerhard, Nils Dieckmann, Christine Sieler, Marcus Zehetbauer, Martin Schriever | 2005-08-30 |