Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9274435 | Illumination system or projection objective of a microlithographic projection exposure apparatus | Damian Fiolka | 2016-03-01 |
| 9116441 | Illumination system of a microlithographic projection exposure apparatus | Manfred Maul, Christian Hettich, Oliver Natt | 2015-08-25 |
| 8767181 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Toralf Gruner, Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Markus Brotsack +4 more | 2014-07-01 |
| 8488104 | Projection objective with diaphragms | Alexander Wolf, Christian Holland, Ulrich Loering, Franz Sorg | 2013-07-16 |
| 8169594 | Illumination system of a microlithographic projection exposure apparatus | Manfred Maul, Christian Hettich, Oliver Natt | 2012-05-01 |
| 8081293 | Illumination system of a microlithographic projection exposure apparatus | Damian Fiolka | 2011-12-20 |
| 7847921 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Toralf Gruner, Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Markus Brotsack +4 more | 2010-12-07 |
| 7808615 | Projection exposure apparatus and method for operating the same | Toralf Gruner, Olaf Conradi, Markus Schwab, Olaf Dittmann, Michael Totzeck +2 more | 2010-10-05 |
| 7593095 | System for reducing the coherence of laser radiation | Damian Fiolka, Manfred Maul | 2009-09-22 |
| 7408616 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Toralf Gruner, Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Markus Brotsack +4 more | 2008-08-05 |
| 7329886 | EUV illumination system having a plurality of light sources for illuminating an optical element | Wolfgang Singer, Martin Antoni, Dirk Rothweiler, Jorg Schultz | 2008-02-12 |
| 6985218 | Method of determining at least one parameter that is characteristic of the angular distribution of light illuminating an object in a projection exposure apparatus | — | 2006-01-10 |
| 6936825 | Process for the decontamination of microlithographic projection exposure devices | Michael Gerhard, Christine Sieler, Marcus Zehetbauer, Martin Schriever, Gerd Reisinger | 2005-08-30 |
| 6707537 | Projection exposure system | Jess Köhler, Johannes Wangler | 2004-03-16 |
| 6636367 | Projection exposure device | Ulrich Drodofsky, Martin Antoni, Hans-Joachim Miesner | 2003-10-21 |
| 6512780 | System for compensating directional and positional fluctuations in light produced by a laser | — | 2003-01-28 |