Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339587 | Facet assembly for a facet mirror | Joachim Hartjes, Toralf Gruner | 2025-06-24 |
| 12326026 | Detecting and preventing a trapping event | Joaquin Rodrigo Pastor, Wolfgang Schellhorn | 2025-06-10 |
| 12031125 | Method for isolating extracellular nucleic acids using anion exchange particles | Sandra Hammerschmidt, Thorsten Voss | 2024-07-09 |
| 11927500 | Method and device for characterizing the surface shape of an optical element | Steffen SIEGLER, Johannes Ruoff, Michael Carl, Toralf Gruner, Thomas Schicketanz | 2024-03-12 |
| 11879721 | Interferometric measurement method and interferometric measurement arrangement | — | 2024-01-23 |
| 11181826 | Projection exposure method and projection exposure apparatus for microlithography | — | 2021-11-23 |
| 11119413 | Imaging optical unit for imaging an object field into an image field | Johannes Ruoff, Susanne Beder, Hans-Juergen Rostalski | 2021-09-14 |
| 11104896 | Method for isolating extracellular nucleic acids using anion exchange particles | Sandra Hammerschmidt, Thorsten Voss | 2021-08-31 |
| 11054755 | Optical module with an anticollision device for module components | Joachim Hartjes, Toralf Gruner | 2021-07-06 |
| 11038237 | Battery pack and electric hand tool | Wolfgang Stickel, Michael Stoll | 2021-06-15 |
| 10898617 | Medical products and methods configured for controlled release of nitric oxide | Hao Chen, Kevin Renehan, Kwun Yin Ho | 2021-01-26 |
| 10761429 | Projection exposure method and projection exposure apparatus for microlithography | — | 2020-09-01 |
| 10709360 | Medical device with integrated biosensor | Hao Chen, Kevin Renehan | 2020-07-14 |
| 10330903 | Imaging optical unit for imaging an object field into an image field, and projection exposure apparatus including such an imaging optical unit | Hans-Juergen Rostalski | 2019-06-25 |
| 10288894 | Optical component for use in a radiation source module of a projection exposure system | Michael Patra, Markus Schwab, Toralf Gruner, Joachim Hartjes | 2019-05-14 |
| 10261425 | Projection exposure apparatus with a highly flexible manipulator | Toralf Gruner, Boris Bittner, Norbert Wabra | 2019-04-16 |
| 10162267 | Projection exposure apparatus including mechanism to reduce influence of pressure fluctuations | Toralf Gruner, Sascha Bleidistel, Joachim Hartjes, Markus Schwab, Markus Hauf | 2018-12-25 |
| 10065345 | Method for transporting expanded thermoplastic polymer particles | Jürgen Bartl, Christian Obermann, Markus Buscher, Gerhard Weis | 2018-09-04 |
| 9759550 | Projection exposure apparatus for microlithography comprising an optical distance measurement system | Markus Schwab, Toralf Gruner, Joachim Hartjes | 2017-09-12 |
| 9720336 | Microlithographic apparatus and method of varying a light irradiance distribution | Holger Walter | 2017-08-01 |
| 9546052 | Method for transporting expanded thermoplastic polymer particles | Markus Buscher, Gerhard Weis, Jürgen Bartl, Christian Obermann | 2017-01-17 |
| 9377608 | Imaging optical unit | — | 2016-06-28 |
| 9228224 | Method for assaying OGFOD1 activity | Christopher Joseph Schofield, Wei Ge, Armin Thalhammer, Christoph Loenarz, Peter John Ratcliffe +1 more | 2016-01-05 |
| 8999982 | Pharmaceutically active compounds as Axl inhibitors | Carsten Schultz-Fademrecht, Bert Klebl, Axel Choidas, Uwe Koch, Jan Eickhoff +1 more | 2015-04-07 |
| 8488104 | Projection objective with diaphragms | Nils Dieckmann, Christian Holland, Ulrich Loering, Franz Sorg | 2013-07-16 |