Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12275625 | Hydraulic system for an industrial truck | Ulrich Knechtel | 2025-04-15 |
| 11953030 | Hydraulic system for an industrial truck | — | 2024-04-09 |
| 11226481 | Methods and apparatuses for designing optical systems using machine learning with delano diagrams | Toufic Jabbour, Christian Wojek, Christoph Menke | 2022-01-18 |
| 10656400 | Imaging optical unit and projection exposure unit including same | — | 2020-05-19 |
| 10558026 | Projection optical unit for imaging an object field into an image field, and projection exposure apparatus comprising such a projection optical unit | — | 2020-02-11 |
| 10545323 | Projection optical unit for EUV projection lithography | Hartmut Enkisch, Thomas Schicketanz | 2020-01-28 |
| 10527832 | Imaging optical unit and projection exposure apparatus including same | Hans-Juergen Rostalski | 2020-01-07 |
| 10288894 | Optical component for use in a radiation source module of a projection exposure system | Michael Patra, Alexander Wolf, Toralf Gruner, Joachim Hartjes | 2019-05-14 |
| 10162267 | Projection exposure apparatus including mechanism to reduce influence of pressure fluctuations | Toralf Gruner, Sascha Bleidistel, Alexander Wolf, Joachim Hartjes, Markus Hauf | 2018-12-25 |
| 10146033 | Projection optical unit for imaging an object field into an image field, and projection exposure apparatus comprising such a projection optical unit | — | 2018-12-04 |
| 10114293 | Illumination system and projection objective of a mask inspection apparatus | Heiko Feldmann, Erik Matthias Sohmen, Joachim Stuehler, Oswald Gromer, Ulrich Mueller +1 more | 2018-10-30 |
| 10012911 | Projection exposure apparatus with wavefront measuring device and optical wavefront manipulator | Michael Arnz, Sascha Bleidistel, Toralf Gruner, Joachim Hartjes | 2018-07-03 |
| 9983483 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra, Stig Bieling, Markus Deguenther, Frank Schlesener | 2018-05-29 |
| 9759550 | Projection exposure apparatus for microlithography comprising an optical distance measurement system | Alexander Wolf, Toralf Gruner, Joachim Hartjes | 2017-09-12 |
| 9678438 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra | 2017-06-13 |
| 9535331 | Optical system for a microlithographic projection exposure apparatus | Michael Patra, Johannes Eisenmenger | 2017-01-03 |
| 9477157 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra, Stig Bieling, Markus Deguenther, Frank Schlesener | 2016-10-25 |
| 9213244 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra | 2015-12-15 |
| 9170499 | Illumination system of a microlithographic projection exposure apparatus comprising a depolarizing element | Damian Fiolka, Manfred Maul, Wolfgang Seitz, Olaf Dittmann | 2015-10-27 |
| 9046786 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra, Stig Bieling, Markus Deguenther, Frank Schlesener | 2015-06-02 |
| 8928859 | Illumination system of a microlithographic projection exposure apparatus | Damian Fiolka, Manfred Maul, Wolfgang Seitz, Olaf Dittmann | 2015-01-06 |
| 8767181 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Toralf Gruner, Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Markus Brotsack +4 more | 2014-07-01 |
| 8542342 | Method of manufacturing a miniaturized device | Aksel Goehnermeier, Toralf Gruner, Tammo Uitterdijk | 2013-09-24 |
| 8537335 | Illumination system for a microlithography projection exposure apparatus, microlithography projection exposure apparatus comprising such an illumination system, and fourier optical system | Michael Layh, Markus Deguenther, Artur Hoegele | 2013-09-17 |
| 8264668 | Illumination system of a microlithographic projection exposure apparatus | Damian Fiolka, Manfred Maul, Wolfgang Seitz, Olaf Dittmann | 2012-09-11 |