Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7847921 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Toralf Gruner, Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Markus Brotsack +4 more | 2010-12-07 |
| 7808615 | Projection exposure apparatus and method for operating the same | Toralf Gruner, Olaf Conradi, Nils Dieckmann, Olaf Dittmann, Michael Totzeck +2 more | 2010-10-05 |
| 7508489 | Method of manufacturing a miniaturized device | Aksel Goehnermeier, Toralf Gruner, Tammo Uitterdijk | 2009-03-24 |
| 7423871 | Electric device with improved cooling and casing therefor | — | 2008-09-09 |
| 7408616 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Toralf Gruner, Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Markus Brotsack +4 more | 2008-08-05 |