Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8792082 | Illumination system for microlithography | — | 2014-07-29 |
| 8767181 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Toralf Gruner, Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Nils Dieckmann +4 more | 2014-07-01 |
| 7884922 | Illumination system for microlithography | — | 2011-02-08 |
| 7847921 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Toralf Gruner, Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Nils Dieckmann +4 more | 2010-12-07 |
| 7714983 | Illumination system for a microlithography projection exposure installation | Jess Koehler, Johannes Wangler, Wolfgang Singer, Damian Fiolka, Manfred Maul | 2010-05-11 |
| 7511886 | Optical beam transformation system and illumination system comprising an optical beam transformation system | Joerg Schultz, Markus Deguenther, Gerhard Fuerter, Wolfgang Singer, Manfred Maul +2 more | 2009-03-31 |
| 7460206 | Projection objective for immersion lithography | Patrick Scheible, Alexander Hirnet, Alexandra Pazidis, Karl-Heinz Schuster, Christoph Zaczek +5 more | 2008-12-02 |
| 7408616 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Toralf Gruner, Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Nils Dieckmann +4 more | 2008-08-05 |
| 7283209 | Illumination system for microlithography | — | 2007-10-16 |