Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977651 | Illumination system particularly for microlithography | Hans-Juergen Mann, Wolfgang Singer, Johannes Wangler, Karl-Heinz Schuster, Udo Dinger +2 more | 2011-07-12 |
| 7592598 | Illumination system particularly for microlithography | Hans-Juergen Mann, Wolfgang Singer, Johannes Wangler, Karl-Heinz Schuster, Udo Dinger +2 more | 2009-09-22 |
| 7551361 | Lithography lens system and projection exposure system provided with at least one lithography lens system of this type | Hans-Juergen Rostalski, Alexander Epple, Aurelian Dodoc, Johannes Wangler, Karl-Heinz Schuster +3 more | 2009-06-23 |
| 7511886 | Optical beam transformation system and illumination system comprising an optical beam transformation system | Markus Deguenther, Markus Brotsack, Gerhard Fuerter, Wolfgang Singer, Manfred Maul +2 more | 2009-03-31 |
| 7456408 | Illumination system particularly for microlithography | Hans-Juergen Mann, Wolfgang Singer, Johannes Wangler, Karl-Heinz Schuster, Udo Dinger +2 more | 2008-11-25 |
| 7348565 | Illumination system particularly for microlithography | Hans-Juergen Mann, Wolfgang Singer, Johannes Wangler, Karl-Heinz Schuster, Udo Dinger +2 more | 2008-03-25 |
| 7186983 | Illumination system particularly for microlithography | Hans-Juergen Mann, Wolfgang Singer, Johannes Wangler, Karl-Heinz Schuster, Udo Dinger +2 more | 2007-03-06 |