Issued Patents All Time
Showing 1–25 of 84 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12320956 | Optical arrangement with an overview function for a catadioptric microscope objective | — | 2025-06-03 |
| 11703674 | Immersion objective | — | 2023-07-18 |
| 10969694 | Projection lens, projection exposure apparatus and projection exposure method | David Shafer | 2021-04-06 |
| 10422985 | Optical imaging device and imaging method for microscopy | Holger Muenz | 2019-09-24 |
| 10281824 | Microlithography projection objective | Heiko Feldmann, Daniel Kraehmer, Jean-Claude Perrin, Julian Kaller, Aurelian Dodoc +4 more | 2019-05-07 |
| 10139734 | Imaging optical unit and projection exposure apparatus for projection lithography, having such imaging optical unit | Ralf Mueller, Hans-Juergen Rostalski | 2018-11-27 |
| 10101668 | Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same | Heiko Feldmann, Hans-Juergen Rostalski | 2018-10-16 |
| 10042146 | Catadioptric projection objective | Vladimir Kamenov, Toralf Gruner, Thomas Schicketanz | 2018-08-07 |
| 9772478 | Catadioptric projection objective with parallel, offset optical axes | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann | 2017-09-26 |
| 9726979 | Catadioptric projection objective with intermediate images | Aurelian Dodoc, Wilhelm Ulrich | 2017-08-08 |
| 9726870 | Catadioptric projection objective | Vladimir Kamenov, Toralf Gruner, Thomas Schicketanz | 2017-08-08 |
| 9541841 | Imaging optical system and projection exposure installation for microlithography including same | Hans-Juergen Mann | 2017-01-10 |
| 9360775 | Method of manufacturing a projection objective and projection objective | Heiko Feldmann, Toralf Gruner | 2016-06-07 |
| 9279969 | Catadioptric projection objective | Vladimir Kamenov, Toralf Gruner, Thomas Schicketanz | 2016-03-08 |
| 9235136 | Projection exposure apparatus for projection lithography | — | 2016-01-12 |
| 9164396 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Norbert Wabra +6 more | 2015-10-20 |
| 9134618 | Catadioptric projection objective with intermediate images | Aurelian Dodoc, Wilhelm Ulrich | 2015-09-15 |
| 9104026 | Optical imaging device and imaging method for microscopy | Ella Mizkewicz, Heiko Feldmann | 2015-08-11 |
| 9097984 | Microlithography projection objective | Heiko Feldmann, Daniel Kraehmer, Jean-Claude Perrin, Julian Kaller, Aurelian Dodoc +4 more | 2015-08-04 |
| 9086561 | Optical arrangement in a projection objective of a microlithographic projection exposure apparatus | Hans-Juergen Rostalski, Tilman Schwertner | 2015-07-21 |
| 9046787 | Microlithographic projection exposure apparatus | Toralf Gruner, Markus Degünther | 2015-06-02 |
| 9019596 | Catadioptric projection objective with intermediate images | Aurelian Dodoc, Wilhelm Ulrich | 2015-04-28 |
| 8913316 | Catadioptric projection objective with intermediate images | Aurelian Dodoc, Wilhelm Ulrich | 2014-12-16 |
| 8908269 | Immersion catadioptric projection objective having two intermediate images | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann +2 more | 2014-12-09 |
| 8873137 | Catadioptric projection objective | Vladimir Kamenov, Toralf Gruner, Thomas Schicketanz | 2014-10-28 |