Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10042248 | Illumination optical unit for a mask inspection system and mask inspection system with such an illumination optical unit | Thomas Korb | 2018-08-07 |
| 9046787 | Microlithographic projection exposure apparatus | Toralf Gruner, Alexander Epple | 2015-06-02 |
| 6885434 | Diaphragm for an integrator unit | Johannes Wangler | 2005-04-26 |