Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293895 | Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methods | Eugen Foca, Amir Avishai, Daniel Fischer | 2025-05-06 |
| 12288705 | FIB-SEM 3D tomography for measuring shape deviations of HAR structures | Amir Avishai, Alex Buxbaum, Eugen Foca, Dmitry Klochkov, Keumsil Lee | 2025-04-29 |
| 12288706 | Parameterizing x-ray scattering measurement using slice-and-image tomographic imaging of semiconductor structures | Hans-Michael Stiepan, Eugen Foca, Alex Buxbaum, Dmitry Klochkov, Jens Timo Neumann | 2025-04-29 |
| 12283504 | Contact area size determination between 3D structures in an integrated semiconductor sample | Alex Buxbaum, Amir Avishai, Dmitry Klochkov, Eugen Foca, Keumsil Lee | 2025-04-22 |
| 12175650 | Processing image data sets | Jens Timo Neumann, Abhilash Srikantha, Christian Wojek | 2024-12-24 |
| 12148139 | Methods and evaluation devices for analyzing three-dimensional data sets representing devices | Ramani Pichumani, Dmitry Klochkov, Jens Timo Neumann | 2024-11-19 |
| 12056865 | Wafer-tilt determination for slice-and-image process | Dmitry Klochkov, Chuong Huynh | 2024-08-06 |
| 12045969 | Automated root cause analysis for defect detection during fabrication processes of semiconductor structures | Jens Timo Neumann, Eugen Foca, Ramani Pichumani, Abhilash Srikantha, Christian Wojek +1 more | 2024-07-23 |
| 11915908 | Method for measuring a sample and microscope implementing the method | Eugen Foca, Amir Avishai, Dmitry Klochkov, Jens Timo Neumann, Keumsil Lee | 2024-02-27 |
| 11848172 | Method for measuring a sample and microscope implementing the method | Dmitry Klochkov, Chuong Huynh, Alex Buxbaum, Amir Avishai | 2023-12-19 |
| 11810749 | Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methods | Eugen Foca, Amir Avishai, Daniel Fischer | 2023-11-07 |
| 11728130 | Method of recording an image using a particle microscope | Dirk Zeidler, Philipp Huethwohl, Jens Timo Neumann, Christof Riedesel, Christian Wojek +2 more | 2023-08-15 |
| 11436506 | Method and devices for determining metrology sites | Abhilash Srikantha, Christian Wojek, Keumsil Lee, Jens Timo Neumann, Eugen Foca | 2022-09-06 |
| 10901391 | Multi-scanning electron microscopy for wafer alignment | Jagdish Chandra Saraswatula, Jens Timo Neumann, Philipp Huethwohl, Raghavendra Hanumantha Nayak | 2021-01-26 |
| 10539883 | Illumination system of a microlithographic projection device and method for operating such a system | Markus Deguenther, Vladimir Davydenko, Dirk Juergens | 2020-01-21 |
| 10444631 | Method of operating a microlithographic projection apparatus and illumination system of such an apparatus | Markus Deguenther, Johannes Eisenmenger, Stefanie Hilt, Frank Schlesener, Manfred Maul | 2019-10-15 |
| 10274828 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Markus Deguenther, Vladimir Davydenko, Johannes Eisenmenger | 2019-04-30 |
| 10061203 | Beam distributing optical device and associated unit, system and apparatus | Markus Deguenther, Michael Patra | 2018-08-28 |
| 10042248 | Illumination optical unit for a mask inspection system and mask inspection system with such an illumination optical unit | Markus Degünther | 2018-08-07 |
| 10012907 | Optical system of a microlithographic projection exposure apparatus | Markus Deguenther | 2018-07-03 |
| 9977334 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Markus Deguenther, Vladimir Davydenko, Johannes Eisenmenger | 2018-05-22 |
| 9946161 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Ingo Saenger, Ralf Scharnweber, Olaf Dittmann, Toralf Gruner, Gundula Weiss +5 more | 2018-04-17 |
| 9910360 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Markus Deguenther, Vladimir Davydenko, Johannes Eisenmenger | 2018-03-06 |
| 9910359 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Vladimir Davydenko, Frank Schlesener, Stefanie Hilt, Wolfgang Hoegele | 2018-03-06 |
| 9500954 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Vladimir Davydenko, Frank Schlesener, Stefanie Hilt, Wolfgang Hoegele | 2016-11-22 |