Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288705 | FIB-SEM 3D tomography for measuring shape deviations of HAR structures | Amir Avishai, Alex Buxbaum, Eugen Foca, Dmitry Klochkov, Thomas Korb | 2025-04-29 |
| 12283504 | Contact area size determination between 3D structures in an integrated semiconductor sample | Alex Buxbaum, Amir Avishai, Dmitry Klochkov, Thomas Korb, Eugen Foca | 2025-04-22 |
| 11915908 | Method for measuring a sample and microscope implementing the method | Eugen Foca, Amir Avishai, Dmitry Klochkov, Thomas Korb, Jens Timo Neumann | 2024-02-27 |
| 11436506 | Method and devices for determining metrology sites | Abhilash Srikantha, Christian Wojek, Thomas Korb, Jens Timo Neumann, Eugen Foca | 2022-09-06 |