Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288706 | Parameterizing x-ray scattering measurement using slice-and-image tomographic imaging of semiconductor structures | Hans-Michael Stiepan, Thomas Korb, Eugen Foca, Dmitry Klochkov, Jens Timo Neumann | 2025-04-29 |
| 12288705 | FIB-SEM 3D tomography for measuring shape deviations of HAR structures | Amir Avishai, Eugen Foca, Dmitry Klochkov, Thomas Korb, Keumsil Lee | 2025-04-29 |
| 12283504 | Contact area size determination between 3D structures in an integrated semiconductor sample | Amir Avishai, Dmitry Klochkov, Thomas Korb, Eugen Foca, Keumsil Lee | 2025-04-22 |
| 11848172 | Method for measuring a sample and microscope implementing the method | Dmitry Klochkov, Chuong Huynh, Thomas Korb, Amir Avishai | 2023-12-19 |
| 7244334 | Apparatus used in reshaping a surface of a photoresist | Melvin Montgomery | 2007-07-17 |
| 7208249 | Method of producing a patterned photoresist used to prepare high performance photomasks | Melvin Montgomery, Scott Edward Fuller, Cecilia Annette Montgomery | 2007-04-24 |
| 7077973 | Methods for substrate orientation | Bjorn Skyberg | 2006-07-18 |
| 6998206 | Method of increasing the shelf life of a blank photomask substrate | Scott Edward Fuller, Melvin Montgomery, Jeffrey Albelo | 2006-02-14 |
| 6931619 | Apparatus for reshaping a patterned organic photoresist surface | Melvin Montgomery | 2005-08-16 |
| 6703169 | Method of preparing optically imaged high performance photomasks | Scott Edward Fuller, Melvin Montgomery, Jeffrey Albelo | 2004-03-09 |
| 6582861 | Method of reshaping a patterned organic photoresist surface | Melvin Montgomery | 2003-06-24 |