Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411417 | Projection objective including an optical device | Johannes Lippert, Toralf Gruner, Kerstin Hild, Thilo Pollak, Jeffrey Cavaco | 2025-09-09 |
| 12405108 | Production method and measurement method | Thomas Monz, Julian Kaller, Ulrich Loering | 2025-09-02 |
| 12332043 | Measurement method for interferometrically determining a surface shape | Sebastian Fuchs, Jochen Hetzler | 2025-06-17 |
| 12288706 | Parameterizing x-ray scattering measurement using slice-and-image tomographic imaging of semiconductor structures | Thomas Korb, Eugen Foca, Alex Buxbaum, Dmitry Klochkov, Jens Timo Neumann | 2025-04-29 |
| 12235097 | Diffractive optical element for a test interferometer | Alexander Winkler, Martin Scheid, Jochen Hetzler, Frank Eisert | 2025-02-25 |
| 12210289 | Mirror, in particular for a microlithographic projection exposure apparatus | Kerstin Hild, Toralf Gruner, Daniel Golde, Vitaliy Shklover | 2025-01-28 |
| 12085780 | Optical system, heating arrangement, and method for heating an optical element in an optical system | Andrea Berner, Susanne Beder, André DIRAUF, Peter Klopfleisch | 2024-09-10 |
| 11809085 | Mirror, in particular for a microlithographic projection exposure apparatus | Toralf Gruner | 2023-11-07 |
| 10509330 | Method and device for characterizing a wafer patterned using at least one lithography step | Andy Zott, Ulrich Mantz | 2019-12-17 |
| 10502545 | Measuring method and measuring arrangement for an imaging optical system | Ulrich Wegmann, Jochen Hetzler | 2019-12-10 |
| 10422718 | Test device and method for testing a mirror | Jochen Hetzler, Sebastian Fuchs | 2019-09-24 |
| 10337850 | Interferometric measuring arrangement | Jochen Hetzler, Sebastian Fuchs, Karl-Heinz Schuster | 2019-07-02 |