Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411417 | Projection objective including an optical device | Toralf Gruner, Kerstin Hild, Hans-Michael Stiepan, Thilo Pollak, Jeffrey Cavaco | 2025-09-09 |
| 12313978 | Optical assembly, projection exposure apparatus and method | Andreas Raba, Markus Raab | 2025-05-27 |
| 11187990 | Mirror for a microlithographic projection exposure apparatus, and method for operating a deformable mirror | Toralf Gruner, Kerstin Hild, Philip Lucke, Mohammadreza Nematollahi | 2021-11-30 |
| 10908509 | Mirror, in particular for a microlithographic projection exposure apparatus | Toralf Gruner, Kerstin Hild | 2021-02-02 |
| 10108094 | Projection exposure apparatus with near-field manipulator | Peter Deufel, Pascal Marsollek, Jasper Wesselingh, Yim-Bun Patrick Kwan | 2018-10-23 |
| 10025200 | Optimum arrangement of actuator and sensor points on an optical element | Pascal Marsollek, Jasper Wesselingh, Sascha Bleidistel | 2018-07-17 |
| 9841577 | Optical element unit | — | 2017-12-12 |
| 9435980 | Optical element unit | — | 2016-09-06 |
| 9195025 | Optical element unit | — | 2015-11-24 |
| 8976927 | Substrate for mirrors for EUV lithography | Claudia Ekstein, Holger Maltor, Martin Weiser, Heiko Siekmann, Udo Dinger | 2015-03-10 |
| 8854743 | Optical element unit | — | 2014-10-07 |
| 8848167 | Optical element for UV or EUV lithography with coatings having optimized stress and thickness | Dirk Schaffer | 2014-09-30 |
| 8599502 | Optical element unit | — | 2013-12-03 |
| 8514371 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2013-08-20 |
| 8456615 | Optical system having heat dissipation arrangement | Hubert Holderer, Armin Schoeppach | 2013-06-04 |
| 8179621 | Apparatus for manipulation of an optical element | Michael Muehlbeyer | 2012-05-15 |
| 7995884 | Device consisting of at least one optical element | Yim-Bun Patrick Kwan, Michael Muehlbeyer | 2011-08-09 |
| 7961294 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2011-06-14 |
| 7944628 | Optical element unit | — | 2011-05-17 |
| 7817990 | Method of ordering location-specific services | Herbert Pamminger, Dirk Fox, Gregor Ponert, Gunther Gisenfelder | 2010-10-19 |
| 7760327 | Reflecting optical element with eccentric optical passageway | Hans-Jürgen Scherle, Yim-Bun Patrick Kwan, Stefan Xalter, Ulrich Weber, Bernhard Geuppert +8 more | 2010-07-20 |
| 7710542 | Imaging device in a projection exposure machine | Wolfgang Hummel, Jurgen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2010-05-04 |
| 7603010 | Device consisting of at least one optical element | Yim-Bun Patrick Kwan, Michael Mühlbeyer | 2009-10-13 |
| 7486382 | Imaging device in a projection exposure machine | Stephan Back, Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz +11 more | 2009-02-03 |
| 7304717 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2007-12-04 |