Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11661194 | Power transmission system | Marc Cortes-Fargas, Wouter BECKERS, Thomas KELLNER | 2023-05-30 |
| 10185221 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Sascha Bleidistel, Ulrich Schoenhoff | 2019-01-22 |
| 10113940 | Coupling device, particularly for coupling damping apparatus on a test frame of a test arrangement and test arrangement with the coupling device | Klaus OSTERHAGE, Siegfried Schindler, Robert E. Bender | 2018-10-30 |
| 10113939 | Test arrangement for testing damper devices for damping a flap that is pivotable about a real pivot axis and method for testing the damper devices | Klaus OSTERHAGE, Siegfried Schindler, Robert E. Bender | 2018-10-30 |
| 9841682 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Sascha Bleidistel, Ulrich Schoenhoff | 2017-12-12 |
| 9605585 | Internal combustion engine, in particular for a motor vehicle, and a method for operating such an internal combustion engine | Martin Bezner, Helmut Gildein, Arnold Kaden, Dirk Sundheim | 2017-03-28 |
| 9568837 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Sascha Bleidistel, Ulrich Schoenhoff | 2017-02-14 |
| 9513562 | Projection exposure apparatus for microlithography for the production of semiconductor components | Armin Schoeppach, Matthias Orth, Norbert Muehlberger, Thorsten Rassel, Armin Werber +1 more | 2016-12-06 |
| 9341807 | Gravitation compensation for optical elements in projection exposure apparatuses | Norbert Muehlberger, Thorsten Rassel, Armin Schoeppach, Matthias Orth | 2016-05-17 |
| 9304404 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Ulrich Schoenhoff, Bernhard Geuppert, Hans Butler, Robertus Johannes Marinus De Jongh | 2016-04-05 |
| 9025128 | Actuator including magnet for a projection exposure system and projection exposure system including a magnet | Armin Werber, Norbert Muehlberger, Almut Czap | 2015-05-05 |
| 8885143 | Projection exposure apparatus for microlithography for the production of semiconductor components | Armin Schoeppach, Matthias Orth, Norbert Muehlberger, Thorsten Rassel, Armin Werber +1 more | 2014-11-11 |
| 8854603 | Gravitation compensation for optical elements in projection exposure apparatuses | Norbert Muehlberger, Thorsten Rassel, Armin Schoeppach, Matthias Orth | 2014-10-07 |
| 8786826 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Sascha Bleidistel, Ulrich Schoenhoff | 2014-07-22 |
| 8632276 | Implement for processing, particularly sealing, ground surfaces under water, particularly bottoms and embankments of waterways, particularly canals, a method for setting up the same, a method for moving the same, a method for sealing ground surfaces using the same, and the like | — | 2014-01-21 |
| 8514371 | Imaging device in a projection exposure facility | Wolfgang Hummel, Karl-Eugen Aubele, Erich Merz, Raoul Reiner, Klaus Rief +10 more | 2013-08-20 |
| 8416390 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Markus Deguenther, Paul Graeupner | 2013-04-09 |
| 8205535 | Fiber cable made of high-strength synthetic fibers for a helicopter recue winch | Florian Kempf | 2012-06-26 |
| 8102506 | Method and device for controlling a plurality of actuators and an illumination device for lithography | Thomas Rohe, Florian Bach | 2012-01-24 |
| 7961294 | Imaging device in a projection exposure facility | Wolfgang Hummel, Karl-Eugen Aubele, Erich Merz, Raoul Reiner, Klaus Rief +10 more | 2011-06-14 |
| 7866245 | Fiber cable made of high-strength synthetic fibers for a helicopter rescue winch | Florian Kempf | 2011-01-11 |
| 7649702 | Immersion lithography objective | Bernhard Gellrich, Paul Graeupner, Andreas Wurmbrand, Bauke Jansen, Bob Streefkerk +2 more | 2010-01-19 |
| 7570343 | Microlithographic projection exposure apparatus | Aurelian Dodoc, Karl-Heinz Schuster, Joerg Mallmann, Wilhelm Ulrich, Hans-Juergen Rostalski +6 more | 2009-08-04 |
| 7545482 | Projection objective of a microlithographic projection exposure apparatus | — | 2009-06-09 |
| 7486382 | Imaging device in a projection exposure machine | Stephan Back, Wolfgang Hummel, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +11 more | 2009-02-03 |