Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345710 | Microlithographic projection exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Karl-Heinz Schuster, Ulrich Loering +6 more | 2019-07-09 |
| 9436095 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Karl-Heinz Schuster, Ulrich Loering +6 more | 2016-09-06 |
| 8330935 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Karl-Heinz Schuster, Ulrich Loering +6 more | 2012-12-11 |
| 7570343 | Microlithographic projection exposure apparatus | Aurelian Dodoc, Karl-Heinz Schuster, Wilhelm Ulrich, Hans-Juergen Rostalski, Hubert Holderer +6 more | 2009-08-04 |
| 7532306 | Microlithographic projection exposure apparatus | Aurelian Dodoc, Karl-Heinz Schuster, Wilhelm Ulrich, Hans-Juergen Rostalski | 2009-05-12 |