Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441970 | Measurement apparatus for measuring a wavefront aberration of an imaging optical system | Helmut Haidner, Michael Samaniego | 2022-09-13 |
| 10345710 | Microlithographic projection exposure apparatus and measuring device for a projection lens | Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster, Ulrich Loering +6 more | 2019-07-09 |
| 10006807 | Apparatus for determining an optical property of an optical imaging system | Markus Goeppert, Helmut Haidner | 2018-06-26 |
| 9436095 | Exposure apparatus and measuring device for a projection lens | Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster, Ulrich Loering +6 more | 2016-09-06 |
| 9429495 | System for measuring the image quality of an optical imaging system | Markus Mengel, Ulrich Wegmann, Wolfgang Emer, Reiner Clement, Ludo Mathijssen | 2016-08-30 |
| 8836929 | Device and method for the optical measurement of an optical system by using an immersion fluid | Ulrich Wegmann, Uwe Shellhorn, Joachim Stuehler, Martin Schriever, Markus Goeppert +1 more | 2014-09-16 |
| 8823948 | System for measuring the image quality of an optical imaging system | Markus Mengel, Ulrich Wegmann, Wolfgang Emer, Reiner Clement, Ludo Mathijssen | 2014-09-02 |
| 8488127 | System for measuring the image quality of an optical imaging system | Markus Mengel, Ulrich Wegmann, Wolfgang Emer, Reiner Clement, Ludo Mathijssen | 2013-07-16 |
| 8330935 | Exposure apparatus and measuring device for a projection lens | Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster, Ulrich Loering +6 more | 2012-12-11 |
| 8212991 | Optical system of a microlithographic projection exposure apparatus | Aurelian Dodoc, Sascha Bleidistel | 2012-07-03 |
| 8120763 | Device and method for the optical measurement of an optical system by using an immersion fluid | Ulrich Wegmann, Uwe Schellhorn, Joachim Stuehler, Martin Schriever, Markus Goeppert +1 more | 2012-02-21 |
| 7796274 | System for measuring the image quality of an optical imaging system | Markus Mengel, Ulrich Wegmann, Wolfgang Emer, Reiner Clement, Ludo Mathussen | 2010-09-14 |
| 7760366 | System for measuring the image quality of an optical imaging system | Markus Mengel, Ulrich Wegmann, Wolfgang Emer, Reiner Clement, Ludo Mathijssen | 2010-07-20 |
| 7408652 | Device and method for the optical measurement of an optical system by using an immersion fluid | Ulrich Wegmann, Uwe Schellhorn, Joachim Stuehler, Helmut Haidner, Martin Schriever +1 more | 2008-08-05 |
| 6864182 | Method of producing large-area membrane masks by dry etching | Jörg Butschke, Karl Kragler, Florian Letzkus, Christian Reuter, Reinhard Springer | 2005-03-08 |
| 6835508 | Large-area membrane mask and method for fabricating the mask | Jörg Butschke, Ernst Haugeneder, Frank-Michael Kamm, Florian Letzkus, Hans Loschner +1 more | 2004-12-28 |
| 6773854 | Method of producing a perforated mask for particle radiation | Ernst Haugeneder, Frank-Michael Kamm, Alexander Petraschenko, Stefan Schunck | 2004-08-10 |
| 6748879 | Goods transfer station and process for operating such a goods transfer station | Lorenz Gilomen | 2004-06-15 |
| 6696206 | Lithography mask configuration | — | 2004-02-24 |
| 6696371 | Method for fabricating positionally exact surface-wide membrane masks | Joerg Butschke, Ernst Haugeneder, Florian Letzkus, Reinhard Springer | 2004-02-24 |