Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7687783 | Multi-beam deflector array device for maskless particle-beam processing | Elmar Platzgummer, Hans Loschner, Samuel Kvasnica, Reinhard Springer, Mathias Irmscher +1 more | 2010-03-30 |
| 6864182 | Method of producing large-area membrane masks by dry etching | Albrecht Ehrmann, Karl Kragler, Florian Letzkus, Christian Reuter, Reinhard Springer | 2005-03-08 |
| 6835508 | Large-area membrane mask and method for fabricating the mask | Albrecht Ehrmann, Ernst Haugeneder, Frank-Michael Kamm, Florian Letzkus, Hans Loschner +1 more | 2004-12-28 |
| 6455429 | Method of producing large-area membrane masks | Florian Letzkus, Elisabeth Penteker, Reinhard Springer, Bernd Hofflinger, Hans Loschner | 2002-09-24 |