Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7687783 | Multi-beam deflector array device for maskless particle-beam processing | Elmar Platzgummer, Hans Loschner, Samuel Kvasnica, Reinhard Springer, Florian Letzkus +1 more | 2010-03-30 |