Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9568907 | Correction of short-range dislocations in a multi-beam writer | Elmar Platzgummer, Christoph Spengler, Markus Wagner | 2017-02-14 |
| 7687783 | Multi-beam deflector array device for maskless particle-beam processing | Elmar Platzgummer, Hans Loschner, Reinhard Springer, Mathias Irmscher, Florian Letzkus +1 more | 2010-03-30 |