Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040157 | Pattern data processing for programmable direct-write apparatus | Elmar Platzgummer, Michael Haberler | 2024-07-16 |
| 11735391 | Charged-particle source | Stefan Gerhold, Werner Rupp, Mattia Capriotti | 2023-08-22 |
| 11569064 | Method for irradiating a target using restricted placement grids | Elmar Platzgummer, Wolf Naetar | 2023-01-31 |
| 11099482 | Adapting the duration of exposure slots in multi-beam writers | Gottfried Hochleitner, Wolf Naetar | 2021-08-24 |
| 10840054 | Charged-particle source and method for cleaning a charged-particle source using back-sputtering | Elmar Platzgummer, Mattia Capriotti | 2020-11-17 |
| 10651010 | Non-linear dose- and blur-dependent edge placement correction | Elmar Platzgummer, Wolf Naetar | 2020-05-12 |
| 10522329 | Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus | Elmar Platzgummer, Wolf Naetar | 2019-12-31 |
| 10325757 | Advanced dose-level quantization of multibeam-writers | Elmar Platzgummer, Hanns Peter Petsch | 2019-06-18 |
| 9568907 | Correction of short-range dislocations in a multi-beam writer | Elmar Platzgummer, Markus Wagner, Samuel Kvasnica | 2017-02-14 |