Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569064 | Method for irradiating a target using restricted placement grids | Elmar Platzgummer, Christoph Spengler | 2023-01-31 |
| 11099482 | Adapting the duration of exposure slots in multi-beam writers | Gottfried Hochleitner, Christoph Spengler | 2021-08-24 |
| 10651010 | Non-linear dose- and blur-dependent edge placement correction | Elmar Platzgummer, Christoph Spengler | 2020-05-12 |
| 10522329 | Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus | Elmar Platzgummer, Christoph Spengler | 2019-12-31 |