Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735391 | Charged-particle source | Stefan Gerhold, Werner Rupp, Christoph Spengler | 2023-08-22 |
| 10840054 | Charged-particle source and method for cleaning a charged-particle source using back-sputtering | Elmar Platzgummer, Christoph Spengler | 2020-11-17 |
| 9922936 | Semiconductor lithography alignment feature with epitaxy blocker | Simone Lavanga, Uttiya Chowdhury | 2018-03-20 |